Data of the figures of the paper: N. Harada, A. Ferrier, D. Serrano, M. Persechino, E. Briand, R. Bachelet, I. Vickridge, J.-J. Ganem, P. Goldner, and A. Tallaire, Chemically Vapor Deposited Eu 3+:Y 2O 3thin Films as a Material Platform for Quantum Technologies, J. Appl. Phys. 128, 055304 (2020). doi: 10.1063/5.0010833