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Effects of Sputtering Process Parameters for PVD Based MEMS Design
https://doi.org/10.6084/m9.figshare.1425286
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Iosr Journals
Dibyendu Roy
Niladri Halder
Tanumoy Chowdhury
Arnab Chattaraj
Pulakesh Roy
DOI registered
May 27, 2015
via DataCite
Dataset published 2015 in
figshare Academic Research System
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